eo_logo
 
Product added to cart

13.5nm, 25.4mm Dia, 5° AOI, EUV Flat Mirror

Extreme Ultraviolet (EUV) Flat Mirrors

Extreme Ultraviolet (EUV) Flat Mirrors

×
Stock #38-759 5-7 Days
×
Quantity Selector - Use the plus and minus buttons to adjust the quantity. +
NT$88,200
Qty 1+
NT$88,200
Volume Pricing
Request Quote
下載產品資料

Specifications

概況

Type:
Flat Mirror

物理和機械特性

Diameter (mm):
25.40 ±0.25
Back Surface:
Commercial Polish
Clear Aperture (%):
90
Edges:
Fine Ground
Parallelism (arcmin):
3
Surface Roughness (Å):
<5 RMS
Thickness (mm):
6.35 ±0.508
Thickness Tolerance (mm):
0.508

光學特性

Surface Flatness (P-V):
λ/10 @ 632.8nm
Substrate: Many glass manufacturers offer the same material characteristics under different trade names. Learn More
Single Crystal Silicon
Surface Quality:
10 - 5
Coating Specification:
Rabs >60% @ 13.5nm, 5° (s-pol)
Coating:
Mo/Si Multilayer
Top Layer: Silicon
Coating Type:
Metal/Semiconductor
Angle of Incidence (°):
5
Design Wavelength DWL (nm):
13.5
Wavelength Range (nm):
13.18 - 13.68
Full Width-Half Max FWHM (nm):
0.50
Reflection at DWL (%):
>60

電氣性能

Center Energy (eV):
92

Regulatory Compliance

RoHS:
Certificate of Conformance:

產品概覽

  • 在 13.5nm 達到最高反射率
  • 專為 EUV 光束轉向及諧波分離所設計
  • 提供 5° 及 45° AOI 版本

極紫外線 (EUV) 平面反射鏡為多層反射鏡,設計用於在設計波長及入射角達到最高反射率。這類反射鏡採用於超拋光單晶矽基材沉積的鍍膜,表面粗糙度低於 3Å RMS。45&deg; AOI 反射鏡適合用於轉向 S 偏振光束,5° AOI 反射鏡則可用於非偏振光束。EUV 反射鏡應用包括同調繞射成像 (CDI) 及材料科學研究。極紫外線 (EUV) 平面反射鏡也能作為高諧波產生 (HHG) 光束的諧波選擇器。

請注意:包含各個反射鏡生產運行樣本的測試數據。

Technical Information

Compatible Mounts

Title  Type 比較 庫存號碼   價格  Buy
25.4mm Optic Dia., Thin Mirror Mount, M4 Fixed #13-590 NT$683
Request Quote
  • 5-7 Days
    ×
25.4mm Optic Dia., Thin Mirror Mount, 8-32 Fixed #13-591 NT$683
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., SM1 Thin Mount, M4 Fixed #13-787 NT$683
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., SM1 Thin Mount, 8-32 Fixed #13-788 NT$683
Request Quote
  • 5-7 Days
    ×
25.4mm Optic Dia., 10mm Max Optic Thickness, Optic Mount Fixed #64-561 NT$1,068
Request Quote
  • 5-7 Days
    ×
25.4mm Optic Dia., 13mm Max Optic Thickness, Optic Mount Fixed #64-562 NT$1,068
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., E-Series Kinematic Mount Adjustable - Tip-Tilt #15-866 NT$1,383
Request Quote
  • 5-7 Days
    ×
25.4mm Optic Dia., Thin Mirror Mount, M4, Quick Start Optical Mounts Fixed #17-534 NT$2,083
Request Quote
  • 聯絡我們
    ×
25.4mm Optic Dia., Thin Mirror Mount, 8-32, Quick Start Optical Mounts Fixed #17-535 NT$2,083
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., SM1 Thin Mount, M4, Quick Start Optical Mounts Fixed #17-536 NT$2,083
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., SM1 Thin Mount, 8-32, Quick Start Optical Mounts Fixed #17-537 NT$2,083
Request Quote
  • 聯絡我們
    ×
2.0 - 35.0mm Optic Dia., Three-Screw Adjustable Ring Mount Fixed #03-668 NT$2,170
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., L-Slot Direct Mount Fixed #36-410 NT$2,328
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., Side Flange Direct Mount Fixed #36-414 NT$2,328
Request Quote
  • 5-7 Days
    ×
9.5 - 73.0mm Optic Dia., Three-Screw Adjustable Ring Mount Fixed #36-605 NT$2,713
Request Quote
  • 聯絡我們
    ×
25/25.4mm Diameter, E-Series Kinematic Mount, Quick Start Optical Mounts Adjustable - Tip-Tilt #17-521 NT$2,783
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., Kinematic Mount, 2-Screws Adjustable - Tip-Tilt #58-851 NT$3,185
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., L-Slot and Rotation Direct Mount Adjustable - Rotary #36-411 NT$3,325
Request Quote
  • 5-7 Days
    ×
25.4mm Optic Dia., Fixed Optic Mount, Quick Start Optical Mounts Fixed #17-515 NT$3,387
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., Kinematic Mount, 3-Screws Adjustable - Tip-Tilt #58-854 NT$3,465
Request Quote
  • 5-7 Days
    ×
7.0 - 40.0 Optic Height, English Bar-Type Optic Holder Fixed #03-676 NT$3,465
Request Quote
  • 5-7 Days
    ×
10.0 - 60.0mm Optic Height, Metric Bar-Type Optic Holder Fixed #55-530 NT$3,535
Request Quote
  • 5-7 Days
    ×
19.5 - 108.0mm Optic Dia., Three-Screw Adjustable Ring Mount Fixed #03-670 NT$3,710
Request Quote
  • 5-7 Days
    ×
7.0 - 67.0 Optic Height, English Bar-Type Optic Holder Fixed #03-669 NT$3,780
Request Quote
  • 5-7 Days
    ×
8.0 - 118.0 Optic Height, English Bar-Type Optic Holder Fixed #03-666 NT$3,920
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., Optical Cell Assembly Fixed #36-461 Clearance NT$4,830
Request Quote
  • 5-7 Days
    ×
25/25.4mm Dia., Kinematic Mount, 3-Screws, Quick Start Optical Mounts Adjustable - Tip-Tilt #17-523 NT$4,865
Request Quote
  • 聯絡我們
    ×
4.0 - 36.0mm Optic Dia., Self-Centering Jaw Clamp Fixed #16-077 NT$5,145
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., Stainless Steel Kinematic Mount, 2-Screws Adjustable - Tip-Tilt #26-815 New NT$5,250
Request Quote
  • 聯絡我們
    ×
2"/50.8mm Diameter, Bar Type Lens / Filter Holder, Quick Start Optical Mounts Fixed #17-530 NT$5,259
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., Stainless Steel Kinematic Mount, 3-Screws Adjustable - Tip-Tilt #26-818 New NT$5,950
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., X-Y Translating Optic Mount Adjustable - Linear (XY) #62-956 NT$9,030
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Diameter, X-Y Translating Quick Start Optical Mounts Adjustable - Linear (XY) #17-513 NT$10,544
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., Kinematic Mirror Mount Adjustable - Tip-Tilt #55-003 NT$10,990
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., Kinematic Mirror Mount with Micrometer Adjustable - Tip-Tilt #55-456 NT$11,795
Request Quote
  • 5-7 Days
    ×
5.0 - 100.0mm Optic Dia., Self-Centering Jaw Clamp Fixed #16-078 NT$13,405
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., Kinematic Mirror Mount with Micrometer, Quick Start Optical Mounts Adjustable - Tip-Tilt #17-519 NT$13,510
Request Quote
  • 聯絡我們
    ×
25.0/25.4mm Optic Dia., X-Y-Z Translating Optic Mount Adjustable - Linear (XYZ) #62-959 NT$17,675
Request Quote
  • 5-7 Days
    ×
25.0/25.4mm Optic Dia., 5 Axes Optical Mount Adjustable - Linear (XYZ) & Tip-Tilt #13-776 NT$24,675
Request Quote
  • 聯絡我們
    ×
 
Sales & Expert Advice
 
or view regional numbers
Easy-to-Use
QUOTE TOOL
enter stock numbers to begin