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深紫外真空相容波片安裝在未經陽極化的鋁製外殼中,具有無膠合劑結構,可減少真空環境中的氣體洩漏。這些波片針對257nm或266nm的設計波長進行優化,穿透率高於99.8%,並提供λ/2或λ/4延遲的選項。這些波片具有優越的延遲容限和零級構造,以及大頻寬和低溫特性。深紫外真空相容撥片在安裝部件邊緣標有快軸慢軸,方便識別和系統整合。這些波片適用於生命科學和光刻微影應用等需要真空環境的場景。
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