本表面品質標準可用於判定光學元件表面上的刮痕和亮點表面缺陷。除了刮痕和亮點標記外,本品還帶60mm刻尺,每個板上都有6個尺寸不一的柵格、6個頻率不一的刻線。柵格可用來測量形狀不規則缺陷的區域。區域的總缺陷面積的平方根即為該區域的等級編號。本標準採用兩個板一組的形式,板1包括範圍從0.004到0.040的等級編號,而板2包括範圍從0.040到0.400的等級編號。第一個面組具有玻璃基片頂部標記的圖案。第二個面組具有玻璃基片底部標記的圖案。正片採用不透明圖案,背景透明;負片為透明圖案,背景不透明。
注意:每個產品均隨附合格證書。
Plate 1 | |||||
Grade No. | Circ. Diameter (μm) | Dim. of Scratch (μm) | Freq. Block (lp/mm) | Grid Block Line W (μm) | Grid Block Line Spacing (μm) |
0.004 | 4.5 | 1 x 16 | 500 | 1 | 4.5 |
0.006 | 7 | 1.6 x 25 | 312.5 | 1.6 | 7 |
0.010 | 11 | 2.5 x 40 | 200 | 2.5 | 11 |
0.016 | 18 | 4 x 63 | 125 | 4 | 18 |
0.025 | 28 | 6.3 x 100 | 80 | 6.3 | 28 |
0.040 | 45 | 10 x 160 | 50 | 10 | 45 |
Plate 2 | |||||
Grade No. | Circ. Diameter (μm) | Dim. of Scratch (μm) | Freq. Block (lp/mm) | Grid Block Line W (μm) | Grid Block Line Spacing (μm) |
0.040 | 45 | 10 x 160 | 50 | 10 | 45 |
0.060 | 70 | 16 x 225 | 31.25 | 10 | 70 |
0.100 | 110 | 25 x 400 | 20 | 10 | 110 |
0.160 | 180 | 40 x 630 | 12.5 | 10 | 180 |
0.250 | 280 | 63 x 1000 | 8 | 10 | 280 |
0.400 | 450 | 100 x 1600 | 5 | 10 | 450 |
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