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深紫外DUV真空相容波片

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  • 有257nm 和266nm 的深紫外波段的波片可供選擇
  • 適用於真空相容的應用場景
  • 安裝部件未經陽極氧化，產品構造未使用膠合劑

深紫外真空相容波片安裝在未經陽極化的鋁製外殼中，具有無膠合劑結構，可減少真空環境中的氣體洩漏。這些波片針對257nm或266nm的設計波長進行優化，穿透率高於99.8%，並提供λ/2或λ/4延遲的選項。這些波片具有優越的延遲容限和零級構造，以及大頻寬和低溫特性。深紫外真空相容撥片在安裝部件邊緣標有快軸慢軸，方便識別和系統整合。這些波片適用於生命科學和光刻微影應用等需要真空環境的場景。

 
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