測微尺上的圓形、方形、條形及其他幾何圖形用於測量系統的校準與驗證(請參閱表格)。還採用2.5”線性尺規來進行較大尺度的校準或測量,每0.5”標記一格。載玻片的尺寸:1"W x 3"L x 1.5mm T。載波片上右邊的大圈直徑為0.5"。檢光板1-4與上邊的圖對應,5-8與下面的圖對應,都是從左到右。圖案1、2、8是透過NIST認證的測微尺。
Plate | Frame Size | Description |
1 | 4.6 x 3.5mm | Circles with 2.00, 1.00, 0.50, and 0.25mm diameter |
2 | 1.0 x 0.8mm | Circles with 0.500, 0.250, 0.125, 0.0625mm diameter |
3 | 1.0 x 0.8mm | 7 bars separated by 30°, 0.200 x 0.020mm |
4 | 1.0 x 0.8mm | Various circles, bars, and angular features |
5 | 1.0 x 0.8mm | Squares of 0.100, 0.040, 0.020mm (2 sets) |
6 | 2.05 x 1.65mm | Grid with 0.050mm lines at 0.100mm pitch |
7 | 4.2 x 3.4mm | Grid with 0.200mm lines at 0.200mm pitch |
8 | 10mm long | Scale with 0.010mm divisions |
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